Research progress of air chemical contaminant control in microelectronics cleaning technology field

Chemical contaminant of air in microelectronic cleanroom seriously affects product quality and yield. With the increasingly small feature size of integrated circuits, the requirements for air chemical contaminant control become more and more strict. This paper studies and summarizes the current situation and control technology of air chemical contaminant in the field of cleaning technology of microelectronics industry, mainly including contaminant definition, contaminant category, AMC/ACC classification of air cleanliness, source and harm of contaminants, contaminant control strategy and contaminant control technology. The development trend is prospected.